Resonant MEMS : fundamentals, implementation and application Brand, Oliver 1964- editor. Dufour, Isabelle (Electrical engineer) editor. Heinrich, Stephen M. editor. Josse, Fabien editor. text bibliography Electronic books. Electronic books. gw Wiesbaden Wiley-VCH Verlag & Co. KGaA [2015] 2015 monographic eng
electronic resource
1 online resource : illustrations. edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse. Includes bibliographical references and index. Microelectromechanical systems Design and construction Microfabrication Resonance TECHNOLOGY & ENGINEERING / Electronics / Digital TECHNOLOGY & ENGINEERING / Electronics / General TECHNOLOGY & ENGINEERING / Electronics / Microelectronics Microelectromechanical systems Design and construction Microfabrication Resonance TK7875 621.381 Resonant MEMS : fundamentals, implementation and application Weinheim, Baden-Württemberg, Germany : Wiley-VCH, c2015 xxv, 483 pages Advanced micro & nanosystems 9783527676361 3527676368 9783527676354 352767635X 9783527676347 3527676341 9783527676330 3527676333 3527335455 9783527335459 http://onlinelibrary.wiley.com/book/10.1002/9783527676330 http://onlinelibrary.wiley.com/book/10.1002/9783527676330 N$T 150504 20171025075516.0 ocn908335689 eng