03028cam a2200721Ii 4500 ocn908335689 OCoLC 20171025075516.0 m o d cr cnu|||unuuu 150504s2015 gw a ob 001 0 eng d 9783527676361 electronic bk. 3527676368 electronic bk. 9783527676354 electronic bk. 352767635X electronic bk. 9783527676347 electronic bk. 3527676341 electronic bk. 9783527676330 electronic bk. 3527676333 electronic bk. 9783527335459 3527335455 9783527335459 AU@ 000055036170 GBVCP 826453139 AU@ 000058373576 DEBBG BV043397763 (OCoLC)908335689 (OCoLC)961627051 (OCoLC)962626856 N$T eng rda pn N$T IDEBK CDX N$T YDXCP RECBK E7B DG1 OCLCF COO OHI DEBBG K6U MAIN TK7875 TEC 008060 bisacsh TEC 008000 bisacsh TEC 008070 bisacsh 621.381 23 Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse. [electronic resource] Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015] 1 online resource : illustrations. text txt rdacontent computer c rdamedia online resource cr rdacarrier Advanced micro and nanosystems Includes bibliographical references and index. Online resource; title from PDF title page (Ebsco, viewed May 11, 2015). Microelectromechanical systems Design and construction. Microfabrication. Resonance. TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh TECHNOLOGY & ENGINEERING / Electronics / General bisacsh TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh Microelectromechanical systems Design and construction. fast (OCoLC)fst01019747 Microfabrication. fast (OCoLC)fst01019807 Resonance. fast (OCoLC)fst01095610 Electronic books. Electronic books. Brand, Oliver, 1964- editor. Dufour, Isabelle (Electrical engineer), editor. Heinrich, Stephen M., editor. Josse, Fabien, editor. Print version: Resonant MEMS : fundamentals, implementation and application. Weinheim, Baden-Württemberg, Germany : Wiley-VCH, c2015 xxv, 483 pages Advanced micro & nanosystems. 9783527335459 Advanced micro & nanosystems. http://onlinelibrary.wiley.com/book/10.1002/9783527676330 Wiley Online Library ddc BK 208021 208021