Resonant MEMS : fundamentals, implementation and application - Brand, Oliver, 1964-; Dufour, Isabelle (Electrical engineer); Heinrich, Stephen M.; Josse, Fabien (Wiesbaden : Wiley-VCH Verlag & Co. KGaA, 2015)
Includes bibliographical references and index.
Online resource; title from PDF title page (Ebsco, viewed May 11, 2015).
Keywords: Microelectromechanical systems -- Design and construction; Microfabrication; Resonance; TECHNOLOGY & ENGINEERING / Electronics / Digital; TECHNOLOGY & ENGINEERING / Electronics / General; TECHNOLOGY & ENGINEERING / Electronics / Microelectronics; Microelectromechanical systems -- Design and construction; Microfabrication; Resonance; Electronic books; Electronic books