Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse. [electronic resource] Brand, Oliver, 1964- editor. Dufour, Isabelle (Electrical engineer), editor. Heinrich, Stephen M., editor. Josse, Fabien, editor. Microelectromechanical systems Design and construction. Microfabrication. Resonance. TK7875 621.381 23 Includes bibliographical references and index. Online resource; title from PDF title page (Ebsco, viewed May 11, 2015). Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015] [2015] 2015 Text 1 online resource : http://onlinelibrary.wiley.com/book/10.1002/9783527676330 eng Advanced micro and nanosystems Advanced micro & nanosystems. Resonant MEMS : fundamentals, implementation and application. Resonant MEMS : fundamentals, implementation and application.