Handbook of 3D Integration : 3D process technology - Garrou, Philip E.; Koyanagi, Mitsumasa; Ramm, Peter (Weinheim, Germany : Wiley-VCH, 2014)
Includes bibliographical references and index.
Online resource; title from PDF title page (John Wiley, viewed Aug. 13, 2014).
Keywords: Three-dimensional integrated circuits -- Design and construction -- Handbooks, manuals, etc; Three-dimensional imaging -- Handbooks, manuals, etc; Electronic books