Handbook of 3D Integration : 3D process technology / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm. [electronic resource] Garrou, Philip E., editor. Koyanagi, Mitsumasa, editor. Ramm, Peter, editor. Three-dimensional integrated circuits Design and construction Handbooks, manuals, etc. Three-dimensional imaging Handbooks, manuals, etc. TK7874.893 621.3815 23 Includes bibliographical references and index. Online resource; title from PDF title page (John Wiley, viewed Aug. 13, 2014). 2014 Text 1 online resource http://onlinelibrary.wiley.com/book/10.1002/9783527670109 eng