@book{207612,
	author = {Garrou, Philip E.,},
	title = {Handbook of 3D Integration : 3D process technology /},
	publisher = {Wiley-VCH,},
	year = {2014.},
	address = {Weinheim, Germany :},
	url = {http://onlinelibrary.wiley.com/book/10.1002/9783527670109}
}