Atomic layer deposition : principles, characteristics, and nanotechnology applications
Kääriäinen, Tommi.
creator
Cameron, David
1949-
Kääriäinen, Marja-Leena.
Sherman, Arthur
1931-
text
bibliography
Electronic books.
Electronic books.
mau
2013
2nd edition.
monographic
eng
1 online resource.
Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.
Includes bibliographical references and index.
Chemical vapor deposition
Epitaxy
Microelectronics
Nanotechnology
SCIENCE
Nanoscience
TECHNOLOGY & ENGINEERING
Nanotechnology & MEMS
Chemical vapor deposition
Epitaxy
Microelectronics
Nanotechnology
Nanotechnologie
Atomlagenabscheidung
Mikroelektromekaniska system
TS695
620/.5
Atomic layer deposition
Kääriäinen, Tommi.
Hoboken, New Jersey : John Wiley & Sons, [2013]
(DLC) 2013016209
9781118747384
1118747380
9781118747421
1118747429
9781118747346
1118747348
9781118747407
1118747402
9781299619128
1299619126
2013016681
http://onlinelibrary.wiley.com/book/10.1002/9781118747407
http://onlinelibrary.wiley.com/book/10.1002/9781118747407
DLC
130423
20171106121240.0
ocn841199237
eng