Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman. [electronic resource] Kääriäinen, Tommi. Cameron, David, 1949- Kääriäinen, Marja-Leena. Sherman, Arthur, 1931- Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. TS695 620/.5 23 Includes bibliographical references and index. Print version record and CIP data provided by publisher. 2013 Text 1 online resource. http://onlinelibrary.wiley.com/book/10.1002/9781118747407 eng Atomic layer deposition. Atomic layer deposition.