@book{206680,
	author = {Kääriäinen, Tommi. and Cameron, David,},
	title = {Atomic layer deposition : principles, characteristics, and nanotechnology applications /},
	publisher = {Scrivener Publishing, LLC ;},
	year = {[2013]},
	address = {Salem, Massachusetts :},
	edition = {2nd edition.},
	url = {http://onlinelibrary.wiley.com/book/10.1002/9781118747407}
}