System-level modeling of MEMS / edited by Tamara Bechtold, Gabriele Schrag, Lihong Feng. [electronic resource] Bechtold, T. (Tamara) Schrag, Gabriele. Feng, Lihong. Microelectromechanical systems Simulation methods. TK7875 .S97 2013 621.381 23 Includes bibliographical references and index. Print version record. Weinheim : Wiley-VCH, ©2013. ©2013. 2013 Text 1 online resource. http://onlinelibrary.wiley.com/book/10.1002/9783527647132 eng Advanced micro et nanosystems ; 10 Advanced micro et nanosystems ; 10.