@book{206551,
	author = {Bechtold, T.},
	title = {System-level modeling of MEMS /},
	publisher = {Wiley-VCH,},
	year = {©2013.},
	series = {Advanced micro et nanosystems ;},
	address = {Weinheim :},
	url = {http://onlinelibrary.wiley.com/book/10.1002/9783527647132}
}