04154cam a2200685Ma 4500 ocn816311244 OCoLC 20171113085140.0 m o d cr cnu|||||||| 120622s2012 gw a ob 001 0 eng 9783527664344 (electronic bk.) 3527664343 (electronic bk.) 9783527664351 3527664351 9781299475991 (MyiLibrary) 129947599X (MyiLibrary) 9783527664375 (electronic bk.) 3527664378 (electronic bk.) 3527411674 9783527411672 9783527664368 (mobi) AU@ 000050138801 DEBBG BV041829500 DEBBG BV041909974 DEBSZ 431241112 NZ1 14873616 NZ1 15341083 (OCoLC)816311244 (OCoLC)815392087 (OCoLC)840258022 (OCoLC)841172161 478849 MIL AU@ eng pn AU@ CUS OCLCQ UIU DG1 YDXCP MHW EBLCP CDX OCLCO COO IDEBK MEAUC OCLCQ OCLCF DEBSZ N$T E7B DEBBG OCLCQ DG1 MAIN QC176.84.O7 Q56 2012 SCI eflch SCI 024000 bisacsh SCI 041000 bisacsh SCI 055000 bisacsh 530.4/275 23 Quinten, Michael. A practical guide to optical metrology for thin films / Michael Quinten. [electronic resource] Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012. 1 online resource : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Includes bibliographical references and index. Cover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement. 7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index. A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag. Print version record. Thin films Optical properties. SCIENCE Energy. bisacsh SCIENCE Mechanics General. bisacsh SCIENCE Physics General. bisacsh Thin films Optical properties. fast (OCoLC)fst01150034 Electronic books. Print version: Quinten, Michael. Practical guide to optical metrology for thin films. Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012 9783527411672 (OCoLC)815367813 http://onlinelibrary.wiley.com/book/10.1002/9783527664344 Wiley Online Library ddc BK 206249 206249