A practical guide to optical metrology for thin films / Michael Quinten. [electronic resource] Quinten, Michael. Thin films Optical properties. QC176.84.O7 Q56 2012 530.4/275 23 Includes bibliographical references and index. Print version record. A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag. Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012. 2012. 2012 Text 1 online resource : http://onlinelibrary.wiley.com/book/10.1002/9783527664344 eng Practical guide to optical metrology for thin films. Practical guide to optical metrology for thin films.