Baklanov, Mikhail. Ho, P. S. Zschech, Ehrenfried. text bibliography Electronic books. nju Hoboken, NJ Wiley 2012 monographic eng

electronic resource

1 online resource "This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"-- Front Matter -- Colour Plates -- Section I: Low-. Low- Materials: Recent Advances / Geraud Dubois, Willi Volksen -- Ultra-Low- by CVD: Deposition and Curing / Vincent Jousseaume, Aziz Zenasni, Olivier Gourhant, Laurent Favennec, Mikhail R Baklanov -- Plasma Processing of Low- Dielectrics / Hualiang Shi, Denis Shamiryan, Jean-Fraṅois de Marneffe, Huai Huang, Paul S Ho, Mikhail R Baklanov -- Wet Clean Applications in Porous Low- Patterning Processes / Quoc Toan Le, Guy Vereecke, Herbert Struyf, Els Kesters, Mikhail R Baklanov -- Section II: Conductive Layers and Barriers. Copper Electroplating for On-Chip Metallization / Valery M Dubin -- Diffusion Barriers / Michael Hecker, Rene Hubner -- Section III: Integration and Reliability. Process Integration of Interconnects / Sridhar Balakrishnan, Ruth Brain, Larry Zhao -- Chemical Mechanical Planarization for Cu₆Low- Integration / Gautam Banerjee -- Scaling and Microstructure Effects on Electromigration Reliability for Cu Interconnects / Chao-Kun Hu, Rene Hubner, Lijuan Zhang, Meike Hauschildt, Paul S Ho -- Mechanical Reliability of Low- Dielectrics / Kris Vanstreels, Han Li, Joost J Vlassak -- Electrical Breakdown in Advanced Interconnect Dielectrics / Ennis T Ogawa, Oliver Aubel -- Section IV: New Approaches. 3D Interconnect Technology / John U Knickerbocker, Lay Wai Kong, Sven Niese, Alain Diebold, Ehrenfried Zschech -- Carbon Nanotubes for Interconnects / Mizuhisa Nihei, Motonobu Sato, Akio Kawabata, Shintaro Sato, Yuji Awano -- Optical Interconnects / Wim Bogaerts -- Wireless Interchip Interconnects / Takamaro Kikkawa -- Index. [edited by] Mikhail Baklanov, Paul S. Ho, Ehrenfried Zschech. Includes bibliographical references and index. Interconnects (Integrated circuit technology) Integrated circuits Ultra large scale integration Integrated circuits Ultra large scale integration Interconnects (Integrated circuit technology) TECHNOLOGY & ENGINEERING Electronics Circuits VLSI & ULSI COMPUTERS Logic Design TECHNOLOGY & ENGINEERING Electronics Circuits Logic Integrated circuits Ultra large scale integration Interconnects (Integrated circuit technology) TK7874.53 .A39 2012eb 621.39/5 Hoboken, NJ : Wiley, 2012 (DLC) 2011038787 (OCoLC)757478544 9781119963240 1119963249 9781119963677 1119963672 1280590807 9781280590801 10.1002/9781119963677 Wiley InterScience http://onlinelibrary.wiley.com/book/10.1002/9781119963677 http://onlinelibrary.wiley.com/book/10.1002/9781119963677 N$T 120228 20171115100346.0 ocn778448543 eng