Advanced interconnects for ULSI technology / [edited by] Mikhail Baklanov, Paul S. Ho, Ehrenfried Zschech. [electronic resource] Baklanov, Mikhail. Ho, P. S. Zschech, Ehrenfried. Interconnects (Integrated circuit technology) Integrated circuits Ultra large scale integration. TK7874.53 .A39 2012eb 621.39/5 23 Includes bibliographical references and index. Print version record. "This book presents an in-depth overview of present status, novel developments and new materials and approaches for advanced interconnect technology"-- Provided by publisher. Hoboken, NJ : Wiley, 2012. 2012. 2012 Text 1 online resource http://onlinelibrary.wiley.com/book/10.1002/9781119963677 eng EBL Advanced interconnects for ULSI technology. Advanced interconnects for ULSI technology.