Pinna, Nicola. Knez, Mato. Wiley InterScience (Online service) text bibliography Electronic books. gw Weinheim Chichester Wiley-VCH John Wiley [distributor] 2011 monographic eng

electronic resource

1 online resource (1 volume) Front Matter -- Introduction to ALD. Theoretical Modeling of ALD Processes / Charles B Musgrave -- Step Coverage in ALD / Sovan Kumar Panda, Hyunjung Shin -- Precursors for ALD Processes / Matti Putkonen -- Sol₆Gel Chemistry and Atomic Layer Deposition / Guylhaine Clavel, Catherine Marichy, Nicola Pinna -- Molecular Layer Deposition of Hybrid Organic₆Inorganic Films / Steven M George, Byunghoon Yoon, Robert A Hall, Aziz I Abdulagatov, Zachary M Gibbs, Younghee Lee, Dragos Seghete, Byoung H Lee -- Low-Temperature Atomic Layer Deposition / Jens Meyer, Thomas Riedl -- Plasma Atomic Layer Deposition / Erwin Kessels, Harald Profijt, Stephen Potts, Richard van de Sanden -- Nanostructures by ALD. Atomic Layer Deposition for Microelectronic Applications / Cheol Seong Hwang -- Nanopatterning by Area-Selective Atomic Layer Deposition / Han-Bo-Ram Lee, Stacey F Bent -- Coatings on High Aspect Ratio Structures / Jeffrey W Elam -- Coatings of Nanoparticles and Nanowires / Hong Jin Fan, Kornelius Nielsch -- Atomic Layer Deposition on Soft Materials / Gregory N Parsons -- Application of ALD to Biomaterials and Biocompatible Coatings / Mato Knez -- Coating of Carbon Nanotubes / Catherine Marichy, Andrea Pucci, Marc-Georg Willinger, Nicola Pinna -- Inverse Opal Photonics / Davy P Gaillot, Christopher J Summers -- Nanolaminates / Adriana V Szeghalmi, Mato Knez -- Challenges in Atomic Layer Deposition / Markku Leskel̃ -- Index. edited by Nicola Pinna, Mato Knez. Includes bibliographical references and index. Chemical vapor deposition Nanostructured materials TECHNOLOGY & ENGINEERING Mechanical Chemical vapor deposition Nanostructured materials TS695 .A86 2011 621.38152 Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2011 (OCoLC)751804738 9783527639915 3527639918 9783527639939 3527639934 9783527639922 3527639926 10.1002/9783527639915 Wiley InterScience http://onlinelibrary.wiley.com/book/10.1002/9783527639915 http://onlinelibrary.wiley.com/book/10.1002/9783527639915 DG1 120119 20171115133957.0 ocn773300979 eng