03723cam a2200589Ka 4500 ocn773300979 OCoLC 20171115133957.0 m o d cr cn||||||||| 120119s2011 gw ob 001 0 eng d 9783527639915 (electronic bk.) 3527639918 (electronic bk.) 9783527639939 3527639934 9783527639922 3527639926 9783527327973 AU@ 000049641677 DEBSZ 431658609 GBVCP 790035332 NZ1 14214512 NZ1 15340704 (OCoLC)773300979 (OCoLC)849922525 (OCoLC)908041352 10.1002/9783527639915 Wiley InterScience http://www3.interscience.wiley.com DG1 eng pn DG1 YDXCP OCLCO OCLCQ OCLCF OCLCA EBLCP MEU N$T DEBSZ E7B IDEBK OCLCQ COO OCLCQ MAIN TS695 .A86 2011 TEC 009070 bisacsh 621.38152 22 Atomic layer deposition of nanostructured materials / edited by Nicola Pinna, Mato Knez. [electronic resource] Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2011. 1 online resource (1 volume) text txt rdacontent computer c rdamedia online resource cr rdacarrier Includes bibliographical references and index. Front Matter -- Introduction to ALD. Theoretical Modeling of ALD Processes / Charles B Musgrave -- Step Coverage in ALD / Sovan Kumar Panda, Hyunjung Shin -- Precursors for ALD Processes / Matti Putkonen -- Sol₆Gel Chemistry and Atomic Layer Deposition / Guylhaine Clavel, Catherine Marichy, Nicola Pinna -- Molecular Layer Deposition of Hybrid Organic₆Inorganic Films / Steven M George, Byunghoon Yoon, Robert A Hall, Aziz I Abdulagatov, Zachary M Gibbs, Younghee Lee, Dragos Seghete, Byoung H Lee -- Low-Temperature Atomic Layer Deposition / Jens Meyer, Thomas Riedl -- Plasma Atomic Layer Deposition / Erwin Kessels, Harald Profijt, Stephen Potts, Richard van de Sanden -- Nanostructures by ALD. Atomic Layer Deposition for Microelectronic Applications / Cheol Seong Hwang -- Nanopatterning by Area-Selective Atomic Layer Deposition / Han-Bo-Ram Lee, Stacey F Bent -- Coatings on High Aspect Ratio Structures / Jeffrey W Elam -- Coatings of Nanoparticles and Nanowires / Hong Jin Fan, Kornelius Nielsch -- Atomic Layer Deposition on Soft Materials / Gregory N Parsons -- Application of ALD to Biomaterials and Biocompatible Coatings / Mato Knez -- Coating of Carbon Nanotubes / Catherine Marichy, Andrea Pucci, Marc-Georg Willinger, Nicola Pinna -- Inverse Opal Photonics / Davy P Gaillot, Christopher J Summers -- Nanolaminates / Adriana V Szeghalmi, Mato Knez -- Challenges in Atomic Layer Deposition / Markku Leskel̃ -- Index. Print version record. Chemical vapor deposition. Nanostructured materials. TECHNOLOGY & ENGINEERING Mechanical. bisacsh Chemical vapor deposition. fast (OCoLC)fst00853229 Nanostructured materials. fast (OCoLC)fst01032630 Electronic books. Pinna, Nicola. Knez, Mato. Wiley InterScience (Online service) Print version: Atomic layer deposition of nanostructured materials. Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2011 9783527327973 (OCoLC)751804738 http://onlinelibrary.wiley.com/book/10.1002/9783527639915 Wiley Online Library ddc BK 205495 205495