Atomic layer deposition of nanostructured materials / edited by Nicola Pinna, Mato Knez. [electronic resource] Pinna, Nicola. Knez, Mato. Wiley InterScience (Online service) Chemical vapor deposition. Nanostructured materials. TS695 .A86 2011 621.38152 22 Includes bibliographical references and index. Print version record. Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2011. 2011. 2011 Text 1 online resource (1 volume) http://onlinelibrary.wiley.com/book/10.1002/9783527639915 eng Atomic layer deposition of nanostructured materials. Atomic layer deposition of nanostructured materials.