00948cam a2200289 i 4500 4110121 BD-DhUL 20141015094940.0 760810s1976 enka b 001 0 eng 75196983 GB*** 0126969507 DLC BD-DhUL BD-DhUL ICU QC702.7.I55 T67 541.2 19 TOI Townsend, P. D. (Peter David) Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. London ; New York : Academic Press, 1976. ix, 333 p. : ill. ; 24 cm. Includes bibliographies and index. Ion implantation. Sputtering (Physics) Kelly, J. C. (John Clive), joint author. Hartley, N. E. W., joint author. 7 cbc orignew 2 ncip 19 y-gencatlg ddc BK 14684 14684 0 0 ddc 0 541_200000000000000_TOI 0 NFIC 26507 DUSL DUSL GEN 2014-10-15 Gift 541.2 TOI A233030 2014-10-15 1 2014-10-15 BK