Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. Townsend, P. D. (Peter David) Kelly, J. C. (John Clive), joint author. Hartley, N. E. W., joint author. Ion implantation. Sputtering (Physics) QC702.7.I55 T67 541.2 19 TOI Includes bibliographies and index. London ; New York : Academic Press, 1976. 1976. 1976 Text ix, 333 p. : eng