<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Insulating films on semiconductors</title>
    <subTitle>proceedings of the second international conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27-29, 1981</subTitle>
  </titleInfo>
  <name type="conference">
    <namePart>INFOS 81 (1981 : Erlangen, Germany)</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Schulz, M. (Max)</namePart>
  </name>
  <name type="personal">
    <namePart>Pensl, G. (Gerhard)</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <genre authority="marc">conference publication</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">gw</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Berlin ; New York</placeTerm>
    </place>
    <publisher>Springer-Verlag</publisher>
    <dateIssued>1981</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>x, 316 p. : ill. ; 22 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">edited by M. Schulz and G. Pensl.</note>
  <note>Includes index.</note>
  <subject authority="lcsh">
    <topic>Metal insulator semiconductors</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Metal oxide semiconductors</topic>
    <topic>Congresses</topic>
  </subject>
  <classification authority="lcc">TK7871.99.M4 I38 1981</classification>
  <classification authority="ddc" edition="19">537.622 SCI</classification>
  <identifier type="isbn">0387110216 (U.S.)</identifier>
  <identifier type="lccn">82130163</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">DLC</recordContentSource>
    <recordCreationDate encoding="marc">820313</recordCreationDate>
    <recordChangeDate encoding="iso8601">20140925130141.0</recordChangeDate>
    <recordIdentifier source="BD-DhUL">4228383</recordIdentifier>
  </recordInfo>
</mods>
