Ion implantation / G. Dearnaley and others. Dearnaley, G. (Geoffrey) Ion implantation. TK7871.85 .I586 537.56 DEI Includes index. Amsterdam, North-Holland Pub. Co.; New York, American Elsevier, c1973. c1973. 1973 Text xv, 802 p. : eng Defects in crystalline solids, v. 8