00678cam a22002291  45000010008000000030008000080050017000160080041000330100017000740150015000910350018001060400045001240420012001690500015001810820015001962450078002112600043002893000028003325040041003606500023004017000024004249851273BD-DhUL20150204133326.0730307s1964    enka     b    000 0 eng    a   63021443   aGB64-22737  a(OCoLC)573233  aDLCcODaWUdOCoLCdInUdUkdDLCdBD-DhUL  apremarc00aTJ940b.B4  a533.5bBEH10aHandbook of vacuum physics :bvol. 3, Technology /cedited by A. H. Beck.  aOxford ;aNew York :bPergamon,c1964.  a   v. :bill. ;c22 cm.  aIncludes bibliographical references. 0aVacuum technology.1 aBeck, A. H. W.eed.