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  <titleInfo>
    <title>Thin film analysis by X-ray scattering</title>
  </titleInfo>
  <name type="personal">
    <namePart>Birkholz, Mario.</namePart>
    <role>
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  </name>
  <name type="personal">
    <namePart>Fewster, Paul F.</namePart>
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  <name type="personal">
    <namePart>Genzel, Christoph.</namePart>
  </name>
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  <originInfo>
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    <place>
      <placeTerm type="text">Weinheim</placeTerm>
    </place>
    <publisher>Wiley-VCH</publisher>
    <dateIssued>c2006</dateIssued>
    <dateIssued encoding="marc">2006</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
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    <extent>xxii, 356 p. : ill. ; 25 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">Mario Birkholz with contributions by Paul F. Fewster, Christoph Genzel.</note>
  <note>Includes bibliographical references and index.</note>
  <subject authority="lcsh">
    <topic>Thin films</topic>
  </subject>
  <subject authority="lcsh">
    <topic>X-ray spectroscopy</topic>
  </subject>
  <classification authority="lcc">QC176.83 .B57 2006</classification>
  <classification authority="ddc" edition="22">530.4275 BIT</classification>
  <identifier type="isbn">3527310525</identifier>
  <identifier type="isbn">9783527310524</identifier>
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