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Semiconductor lithography : principles, practices, and materials /

by Moreau, Wayne M.
Material type: materialTypeLabelBookSeries: Microdevices.Publisher: New York : Plenum Press, c1988Description: xx, 931 p. : ill. ; 25 cm.ISBN: 0306421852.Subject(s): Semiconductors | Microlithography | Photoresists
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621.38152 MOP Power electronics : 621.38152 MOP Power electronics : 621.38152 MOP Power electronics : 621.38152 MOS Semiconductor lithography : 621.38152 NGC Complete guide to semiconductor devices / 621.38152 NOE Electronic power control and digital techniques / 621.38152 QUA Quantum coherence in solid state systems :

Includes bibliographies and index.

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