Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /
editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
- New York : North-Holland, c1983.
- xiii, 298 p. : ill. ; 24 cm.
- Materials Research Society symposia proceedings ; v. 17 .
- Materials Research Society symposia proceedings ; v. 17. .
"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Includes bibliographical references and indexes.
0444007822 : $73.00
83008028
Lasers--Industrial applications--Congresses.
Semiconductors--Congresses.
TA1673 / .L355 1983
621.3815 / OSL
"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Includes bibliographical references and indexes.
0444007822 : $73.00
83008028
Lasers--Industrial applications--Congresses.
Semiconductors--Congresses.
TA1673 / .L355 1983
621.3815 / OSL