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Irene, Eugene A.

Surfaces, interfaces, and thin films for microelectronics / Eugene A. Irene. - Hoboken, N.J. : Wiley-Interscience, c2008. - xiii, 515 p. : ill. ; 25 cm.

Includes bibliographical references and index.

ISBN: 9780470174470 (cloth) 0470174471 (cloth)

LCCN: 2007024692

Nat. Bib. No.: GBA788215 bnb

Nat. Bib. Agency Control No.: 014235237 Uk

Subjects--Topical Terms:
Surface chemistry.
Interfaces (Physical sciences)
Thin films.
Microelectronics--Materials.

LC Class. No.: QD506 / .I74 2008

Dewey Class. No.: 621.381 / IRS

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