Quirk, Michael. 1953-
Semiconductor manufacturing technology / Michael Quirk and Julian Serda. - Upper Saddle River, NJ : Prentice Hall, c2001. - xiii, 666 p. : ill. ; 29 cm.
Includes bibliographical references (p. 647) and index.
0130815209
00041653
Electronic industries.
Semiconductors--Design and construction.
TK7836 / .Q27 2001
621.38152 / QUS
Semiconductor manufacturing technology / Michael Quirk and Julian Serda. - Upper Saddle River, NJ : Prentice Hall, c2001. - xiii, 666 p. : ill. ; 29 cm.
Includes bibliographical references (p. 647) and index.
0130815209
00041653
Electronic industries.
Semiconductors--Design and construction.
TK7836 / .Q27 2001
621.38152 / QUS